JPH0115178Y2 - - Google Patents
Info
- Publication number
- JPH0115178Y2 JPH0115178Y2 JP16742783U JP16742783U JPH0115178Y2 JP H0115178 Y2 JPH0115178 Y2 JP H0115178Y2 JP 16742783 U JP16742783 U JP 16742783U JP 16742783 U JP16742783 U JP 16742783U JP H0115178 Y2 JPH0115178 Y2 JP H0115178Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chemical
- tank
- carrier
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000000243 solution Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 239000003595 mist Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 206010025482 malaise Diseases 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16742783U JPS6076035U (ja) | 1983-10-31 | 1983-10-31 | シリコンウェファの処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16742783U JPS6076035U (ja) | 1983-10-31 | 1983-10-31 | シリコンウェファの処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6076035U JPS6076035U (ja) | 1985-05-28 |
| JPH0115178Y2 true JPH0115178Y2 (en]) | 1989-05-08 |
Family
ID=30366295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16742783U Granted JPS6076035U (ja) | 1983-10-31 | 1983-10-31 | シリコンウェファの処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6076035U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6468956B2 (ja) * | 2015-06-25 | 2019-02-13 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法及びその装置 |
-
1983
- 1983-10-31 JP JP16742783U patent/JPS6076035U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6076035U (ja) | 1985-05-28 |
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